Abstract
Miniaturization is the most sophisticated method for achieving UHF and SHF resonance frequencies in RF MEMS resonators. However, by reducing the dimensions of the resonators, the size of their supports become more comparable with the size of the resonator and anchor loss becomes the dominant loss mechanism, thereby suppressing the quality factor. This study considers, Ring Shape Anchored Contour Mode Disk Resonator and calculates anchor loss effects using both energy loss and acoustic impedance ratio methods. Results of analytical calculations are verified using finite element harmonic analysis. Simulation results show that RSACMDRs have an acceptable quality factor in comparison with the other state-of-the-art resonators.
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