Analyzing the effect of dynamic properties of materials and operating medium on sensor parameters to increase the performance of diaphragm-based static/dynamic pressure sensors

Abstract

In the design of a high-performance diaphragm-based static/dynamic pressure sensor (DB-S/DPS), researchers have mostly carried out studies on static deflection and frequency analysis without including diaphragm vibration damping and the effect of the operating medium (OM). However, diaphragms and OM usually contain dynamic processes where vibration damping occurs with constantly changing frequency parameters. Therefore, to design a sensor that will work in such an OM, the effect of the dynamic pressure performance of the diaphragm materials on the sensor parameters (sensitivity, bandwidth, linearity) becomes even more important. In this study, for the first time in the literature, the effect of many different parameters on sensor parameters at the same time was analyzed by theoretically examining the dynamic deflection and static deflection expressions that the researchers did not consider in the pressure sensor design. Also, for the first time in the literature, the analysis of the dynamic parameters of many diaphragm materials and sensor operating media was carried out with this study. In order to determine the effect of the dynamic pressure performance of the diaphragms on sensor parameters in high-performance DB-S/DPS design, multiple parameter implementation (MPI) was carried out with MATLAB software. MPI has been realized considering various diaphragm materials, alternative operating media, and all the dynamic parameters (the damping ratio of the medium, added virtual mass incremental factor). In the work, metallic (Al, Au), polymer (cellulose triacetate), semiconductor (Si), glass derivative (SiO2), and two-dimensional (graphene) materials which are frequently reported in the literature were chosen as the diaphragm. The effects of these selected materials and OMs (air, water, mineral oil) on sensor parameters were examined in detail. To the best of our knowledge, there is no comprehensive study in the literature involving such dynamic pressure parameters. With this valuable research, considering the forced oscillations and damping, valuable and interesting results are presented that can guide DB-S/DPS designers.