Abstract
In this paper, the impact of factors on frequency conversion efficiency has analyzed departing from the theoretical formula of frequency doubling frequency efficiency. The results of analyzing show that the frequency multiplication efficiency closely to be not only related to the fundamental frequency laser parameter, but also influenced by several factors such as crystal type, crystal length and so forth. Because of the needs of high conversion efficiency of doubling frequency, the fundamental frequency laser parameter, the crystal type and the crystal length must be determined reasonably to achieve the optimum parameter between fundamental wave peak power density and phase mismatch factor. To compare with the conclusion mentioned above, an experimental device was established on 266nm quadrupler UV laser and 10mJ UV laser which quadruple conversion efficiency 15.5% was achieved in the condition of fundamental frequency single pulse energy 60mJ, the divergence angle under the beam quality M <sup>2</sup>=2, pulse width 10ns.
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