Analytical Review on Enhancing Sustainability in microsystems by Integrating MEMS for Compact Design

Abstract

By combining silicon-based microelectronics with micromachining technology, microelectromechanical systems (MEMS) have been identified as one of the most promising technologies for the 21st Century. With its microsystem-based devices and technologies, it will have a dramatic impact on the way we live and the way we live our lives. With an emphasis on both commercial applications and device fabrication methods, the paper provides an introduction to the field of MEMS. As well as discussing the range of MEMS sensors and actuators, the phenomena that MEMS devices can sense and act upon, and the major challenges facing the industry, the presentation discusses the challenges faced by the MEMS industry. An introduction to the field of MEMS is presented in this paper, which is divided into four sections. A section on MEMS introduces the reader to its definitions, history, current applications, and miniaturization-related issues. Photolithography, bulk micromachining, surface micromachining, and high-aspect-ratio micromachining are among the fundamental fabrication methods discussed in the second section, as well as assembly, system integration, and packaging of MEMS devices. A brief description of the basic principles of sensing and actuation mechanisms is provided in the third section, which discusses the range of MEMS sensors and actuators, as well as the phenomena that can be sensed or acted upon with MEMS devices. Toward the commercialization and success of MEMS, the final section illustrates the challenges facing the industry.