Abstract
Abstract A new method has been developed for the design of a highly sophisticated monochromator equipped with a holographic or a ruled grating with variable spacing and curved grooves. The method utilizes analytical expression of the spot diagrams, as well as a merit function which closely represents the rms spread of the spots formed when an infinite number of rays are traced. Unlike other design methods based on the light path function, the present method takes into account all the possible aberrations (up to third order) in spectral images, the ruled area, and the slit height. Also given are design examples of a high-resolution VUV monochromator.
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