Analytical Modeling of the Mechanical Behavior of MEMS/NEMS-Multilayered Resonators With Variable Cross-Sections for Sensors and Energy Harvesters

Eustaquio Martinez-Cisneros,Omar Isaac Nava-Galindo,Luis A Velosa-Moncada,Arxel De Leon,Rene Perez-Cuapio,Agustin L Herrera-May,Rolando Salgado-Estrada,Ernesto A Elvira-Hernandez,Francisco Lopez-Huerta,Luz Antonio Aguilera-Cortes

doi:10.1109/access.2021.3084600

Eustaquio Martinez-Cisneros, Omar Isaac Nava-Galindo + Show 8 more

Open Access

https://doi.org/10.1109/access.2021.3084600

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Abstract

Resonators based on micro and nanoelectromechanical systems (MEMS/NEMS) are used in many applications, including biological and gas sensors, magnetic field sensors, RF switches, accelerometers, piezoelectric micro and nanogenerators, and viscosity sensors. The design of these resonators requires analytical models to predict their mechanical behavior and optimize the sensitivity and resolution. However, most of these models are only applied to resonators with rectangular and uniform cross-sections. In this paper, we present the analytical modeling to determine the first bending resonant frequency, out-of-plane deflections, and normal stresses of MEMS/NEMS-based multilayered resonators with variable cross-sections and multiple fixed supports. The proposed modeling is derived using the well-known Rayleigh and Macaulay methods, as well as the Euler-Bernoulli beam theory. This analytical modeling is applied to four multilayered resonators with different clamped supports and non-uniform cross-sections. The results of our analytical modeling agree well with respect to those of finite element method (FEM) models and experimental data reported in the literature. The proposed analytical modeling can be used to estimate the frequency shift of resonators due to variations of their geometric parameters, number of clamped-supports or mechanical properties of the materials. Furthermore, this modeling can be used to obtain optimal designs of resonators that ensure safe operations and enhanced performance for sensors and energy harvesters in telecommunications, automotive sector, aerospace industry, consumer electronics, non-destructive testing, and navigation.

Highlights

In recent years, most of the conventional micro and nanoelectromechanical systems (MEMS/NEMS) have become partThe associate editor coordinating the review of this manuscript and approving it for publication was Hassen Ouakad .of significant industrial and consumer products
We propose an analytical modeling to predict the first bending resonant frequency, out-of-plane deflections, and normal stresses of MEMS/NEMS-based multilayered resonators with variable cross-sections and different fixed supports at one of their ends
This work is organized as follows: in section 2, we describe the analytical model to determine the first bending resonant frequency and mechanical stresses of multilayered resonators with variable cross-sections

Summary

INTRODUCTION

Most of the conventional micro and nanoelectromechanical systems (MEMS/NEMS) have become part. Martínez-Cisneros et al [34] established an analytical modeling of the first bending resonant frequency and out-of-plane displacements for single-clamped multilayered structures This modeling is restrained to multilayered resonators with symmetrical complex cross-sections, and it cannot be used in resonators with irregular geometrical shapes and with several fixed supports. We propose an analytical modeling to predict the first bending resonant frequency, out-of-plane deflections, and normal stresses of MEMS/NEMS-based multilayered resonators with variable cross-sections and different fixed supports at one of their ends. This model considers multilayered non-uniform structures and variable cross-sections.

ANALYTICAL MODELING

FIRST BENDING RESONANT FREQUENCY

FIRST CASE

SECOND CASE

THIRD CASE

CONCLUSION