Analytical modeling of Ni–Co based multilayer bimorph actuators involving dual insulation layers

Abstract

This paper proposes a new design of multilayered bimorph electrothermal actuators based on a Ni and Co alloy (Ni–Co) substrate and analytical models to estimate their performance. The proposed bimorph actuator consists of a flexible Ni–Co substrate having high coefficient of thermal expansion (CTE) along with two insulation (low-CTE materials) and Pt heater layers. A multilayered thermo-mechanical model to estimate the tip deflection was derived based on Timoshenko’s classical model for metal bilayers. An analytical model based on the Euler–Bernoulli beam theory was also derived to calculate the blocking force of the multilayered actuators. An appropriate layer composition of the low-CTE layers was derived based on the analytical models and lattice parameters of the adjacent layers: the performance of the bimorph actuator was significantly improved when the low-CTE layers are composed of a dual layer instead of a single layer of SiO2. The analytical solutions of the simplified 3D models were then compared with finite element analysis (FEA) and experimental results. In the comparison of the tip deflection, the analytical solution of the three-layer actuator omitting the Pt heater was similar to the FEA result and the experimental result compensating for the initial dead zone. In the comparison of the blocking force, the analytical solution was also similar to the FEA results, though there was a deviation from the experimental results. Abnormal behavior of the actuator was observed in the experimental result of the blocking force, and the cause was investigated in this study.