Abstract
The three-gate (TG) silicon-on-insulator (SOI) metal–semiconductor field-effect transistor (MESFET) is proposed as an innovative type of device for use in high-density and high-speed applications. The new design is expected to exhibit excellent immunity against short-channel effects (SCEs) as well as reduced leakage current. To investigate the subthreshold characteristics of the device, a physically based analytical model for the channel potential and threshold voltage is developed based on an analytical solution of the three-dimensional Poisson equation with suitable boundary conditions. Using the model, design features including important device parameters and bias condition are examined and compared with a classical SOI-MESFET. The accuracy of the model is validated by comparison of the analytical results with the results of Silvaco simulations as well as experimental data.
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