Abstract
Electron tomography is a powerful technique for 3D characterization at the nanoscale. Recent developments focus on extracting a wide range of information about a sample in 3D [1]. Of special interest is the combination of electron tomography with spectroscopic techniques EFTEM, EELS and EDS to recover the information present in spectroscopic signals in three dimensions. Analytical electron tomography allows mapping of chemical variations and gradients, approaching the goal of full 3D elemental quantification [2]. Additionally, EELS tomography can be used to extract information about materials properties or chemical bonding [3,4]. In this presentation we will discuss the steps necessary to successfully combine spectroscopy and tomography and show respective applications.
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