Abstract
Analytical electron microscopy enables combined crystallographic and chemical information with a high spatial resolution to be gained from microregions of electron-transparent specimens. This is reached by the combined application of imaging, diffraction and spectroscopic methods, using either a dedicated scanning transmission electron microscope or a conventional high-resolution electron microscope (having a strong objective lens) equipped with suitable X-ray or electron spectrometers. Of the diffraction methods especially the technique of convergent beam diffraction is used, yielding valuable information on crystal structures, lattice parameter changes, symmetry variations and crystal perfection, respectively. For chemical analysis, either energy-dispersive X-ray spectroscopy (EDX) is used or electron energy loss spectroscopy (EELS). Finally, high-resolution electron microscopy in the lateral resolution range of some 0.1 nm allows the reliable geometrical inspection of extreme microregions.
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