Abstract
In this paper, analytical analysis of capacitive pressure sensor with clamped diaphragm is presented. Mechanical and electrical properties of the sensor are theoretically analyzed based on theory of thin plates with small deflection and the results are evaluated using finite element analysis. The central deflection and capacitance values under uniform external pressure are calculated. Comparison of theoretical results shows good agreement with finite element analysis. The results indicate that the mathematical model has a high accuracy to determine the sensor behaviors.
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