Abstract

A beam flexural-mode piezoelectric bimorph actuator is analyzed based on linear piezoelectricity, and the performance of the actuator is studied. The beam bimorph piezoelectric actuator (BBPA), which is a sand- wich compound consisting of a lower and an upper piezoelectric ceramic surface layer and a middle layer made of metal, is driven to flexural deformation. The statistical analytical solution and dynamical solutions from the three-dimensional equations of linear piezoelectricity are derived, and the dependence of the performance upon the physical parameters of the BBPA is evaluated. Numerical results illustrate the strengthened performance achieved by adjusting the geometrical and material parameters of the BBPA.©2015SocietyofPhoto-OpticalInstrumentation

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