Abstract
The impacts of electro-mechanic-fluid parameters on the transverse deflection behavior of the silicone-based piezoelectric diaphragm (SPD) with translational and rotational elastic edges were investigated. The bottommost silicone layer was assumed to be an elastic plate with uniformly distributed elastic restraints along the edges. The closed-form analytical expression for SPD deflections was derived by using classical laminated plate theory based on Kirchhoff’s plate assumptions. The analytical model was validated by experimental, FE methods and the results of the other study. The deflection responses of SPD were examined according to uniform fluid pressure, electric voltage, elastic parameters, dimensions, and material properties.
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