Abstract

Numerical calculation is used to investigate influencing factors on the surface displacement of a bimorph deformable mirror. It's shown that the value of response function is direct proportional to the loading voltage, inverse proportional to the square of the thickness of PZT layer, and increased about 1.4 times when the area of the electrode doubles. Besides, the displacement is closely related to the distance of the control layer from median plane. As a conclusion, the farther electrode contributes the larger deformation. Furthermore, we have discussed the problem of singular solutions at inner and outer boundary.

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