Abstract
AbstractDifferent samples of ZnO thin films, manufactured using different techniques, namely metal organic chemical vapour deposition (MOCVD) and pulsed laser deposition (PLD) as well as a commercial bulk sample of ZnO were examined. SHG surface scan images of the samples were recorded measuring the SH signal in reflection. The information from these measurements can be used as a measure of the thickness and uniformity of the samples. Therefore SHG has potential as an in situ monitoring method during various manufacturing processes of ZnO thin films and thin film devices. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
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