Analysis of viscosity sensitivity for liquid property detection applications based on SAW sensors

Abstract

An investigation of viscosity sensitivity for liquid property detection applications based on the ZnO/SiO 2/Si layered structure Love mode surface acoustic wave (SAW) sensors is presented. One of our interests in this paper is to optimize the SAW viscosity sensor under the condition of temperature stability by considering the relations among electromechanical coupling coefficient, viscosity sensitivity and temperature coefficient of delay (TCD). Some important results have been obtained by solving the system of coupled electromechanical field equations and Navier–Stokes equation. It is found that the electromechanical coupling coefficient and viscosity sensitivity can be further improved by adjusting the thickness of SiO 2 thin film and a zero TCD device also can be obtained by introducing a SiO 2 thin film with proper thickness. We try to obtain a device which possesses the viscosity sensitivity as high as possible and has zero TCD. Another interest of this paper is to improve the traditional viscosity sensitivity expression by considering the coupling effect between the liquid viscosity and density. It is shown that the coupling effect cannot be neglected from the numerical results. This modification could make the obtained viscosity more accurate. This analysis is meaningful for the manufactures and applications of the ZnO/SiO 2/Si structure Love wave sensor for liquid property detection.