Abstract
We have developed a general-purpose elec- tron beam excitation ultra-soft X-ray microanalyzer with a new high-resolution flat-field varied-line-spac- ing (VLS) grating spectrometer in order to analyze the ultra light elements such as Li and Be. This spectrom- eter has a sufficiently high energy resolution and has a high sensitivity using metallic Li. However, the in- tensity of Li-Kspectra of LiNbO3 or LiTaO3 are so weak. On the other hand, in spite of a few ratios of copper in Al-Cu alloys, Al LII IIIM peak shape significantly changed. A peak of Al LII IIIM was sen- sitive to a state of an alloy. Then, we have applied the non-destructive chemical state analysis of interface between Al and Cu junction. In consequence, the ex- istence of � , � andlayers could be confirmed clearly in an interface of Al and Cu junction.
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