Abstract
At high blade speeds, the traditional two-dimensional (2D) infinite blade row model of a single turbomolecular pump (TMP) stage becomes inappropriate and a three-dimensional (3D) model should be used. The reasons for the improved compression performance predicted in 3D are investigated by comparing the velocity, angular and spatial probability distributions of particles obtained from Monte Carlo simulation. In addition, that direct multiple stages are better than the extrapolation of single stage results would suggest due to the modification of the angular probabilty distribution by adjacent stages. The flow is examined for a rotor-stator combination.
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