Abstract

ABSTRACT The effect of the C-axis angle of inclination on the thickness vibration modes of Thin Film Bulk Acoustic Wave Resonators (FBAR) is discussed. Theoretical analysis for the frequency equation and mode shape of C-axis inclined FBAR connected with an external impedance is carried out. The impedance characteristics of FBAR are derived and compared with previous experimental results.

Full Text
Paper version not known

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Similar Papers

Paper Title
Journal
Date
Author
The Improvement of Temperature Coefficient of Frequency in Thin Film Bulk Acoustic Wave Resonator using Secondary Harmonics
Yukio Yoshino ...
MRS Proceedings | VOL. 741
Yukio Yoshino, et. al.Yukio Yoshino ...
01 Jan 2002
Determination of ZnO temperature coefficients using thin film bulk acoustic wave resonators
S.L Pinkett ... W.D Hunt
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control | VOL. 49
S.L Pinkett, et. al.S.L Pinkett ... W.D Hunt
01 Nov 2002
Piezoelectric thin films for bulk acoustic wave resonator applications
-
01 Jan 2004
Fabrication of 5GHz band film bulk acoustic wave resonators using ZnO thin film
R Kubo ... H Kawamura
-
R Kubo, et. al.R Kubo ... H Kawamura
05 Oct 2003
View more papers

More From: Integrated Ferroelectrics

Paper Title
Journal
Date
Author
Damage Detection and Prediction of Ultrasonic Behaviours in Piezoelectric Materials Using Hybrid Deep Convolutional Neural Network
Prashant Vishnu Bhosale ... Sudhir D Agashe
Integrated Ferroelectrics | VOL. 240
Prashant Vishnu Bhosale, et. al.Prashant Vishnu Bhosale ... Sudhir D Agashe
02 Jan 2024
Reducing Search Space for Halide Perovskites: Comparing New Simple Material Model (NSMM), Coin-Flip, Goldschmidt’s Tolerance Factor Formalism (GTFF), and SPuDS Algorithm
Steven C Tidrow
Integrated Ferroelectrics | VOL. 240
Steven C TidrowSteven C Tidrow
02 Jan 2024
Study on Safe Working Condition of the Electrothermal U-Shaped Actuator
Zhenlu Wang ... Jiue Zhang
Integrated Ferroelectrics | VOL. 240
Zhenlu Wang, et. al.Zhenlu Wang ... Jiue Zhang
02 Jan 2024
Synthesis and Investigation of Structural and Optical Properties of Nitrogen-doped Carbon Quantum Dots
Babak Emdadi ... Ahmet Asimov
Integrated Ferroelectrics | VOL. 240
Babak Emdadi, et. al.Babak Emdadi ... Ahmet Asimov
02 Jan 2024
View more papers

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.