Abstract
Thermoelastic damping effects are very important intrinsic losses in microelectromechanical system/nanoelectromechanical system based sensors and filters, which limit the maximum achievable quality factor. Thermoelasticity arises due to coupling between the temperature field and elastic field of the material and its interaction within the material structure. The impacts of axisymmetric and non-axisymmetric vibrations, plate dimensions, material parameters, boundary conditions, mode switching, and temperature on thermoelastic damping limited quality factors (QTED) and critical thickness (hc) were analyzed, and the conditions for an enhanced quality factor were optimized in this work. The analytical models of circular plate resonators have been developed in terms of material performance indices for axisymmetric and non-axisymmetric vibrations. QTED and hc were analyzed based on two boundary conditions: simply supported and clamped–clamped. In order to obtain maximum QTED, micro-circular plates with diamond as the structural material operating at a lower temperature and with non-axisymmetric vibrations are proposed in this paper.
Highlights
The coupling equations of thermoelasticity were solved on the basis of material performance index parameters for non-axisymmetric and axisymmetric vibrations of a circular plate resonator, and its thermoelastic damping limited quality factors were investigated
Based on the numerical simulations of the equations obtained from the analytical models, it was found that the nonaxisymmetric vibrations provide the maximum thermoelastic damping limited quality factor, QTEDMAX
The thermoelastic energy dissipation was found to be almost independent of mode switching and boundary conditions under equilibrium temperature
Summary
The quality factor is one of the important design parameters of a micro-/nano-resonator for many applications, which is the ratio of the amount of energy stored in the system to the amount of energy dissipated by the system. Thermal currents generated due to the compression/decompression in elastic media cause thermoelastic damping. Because of the reliability of batch fabrications, low power consumption, small size, high sensitivity, fast response, and many other potential applications in engineering, microelectromechanical system (MEMS) based devices are widely used as sensors, filters, modulators, and actuators. To evaluate thermoelastic damping in vibrating beams, Zener derived an analytical solution for energy dissipation, which is expressed as. Salajeghe studied the nonlinear analysis of TED in axisymmetric vibration of micro-circular thin-plate resonators. To curtail energy dissipation, the impacts of types of vibration such as axisymmetric and non-axisymmetric modes, plate dimensions, mode switching, boundary conditions, and temperature on the thermoelastic damping limited quality factor (QTED) and critical thickness (hc) are investigated.
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