Abstract
A self-consistent analysis of the available data on thermodynamic properties and phase equilibria in the Si-P system is performed. Thermodynamic properties of solid and liquid solutions of phosphorus in silicon are approximated on the basis of the concepts of dilute and ideal associated solutions. The thermodynamic properties and phase boundaries in the range of compositions 0 ≤ x(P) ≤ 0.5 are adequately described.
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