Abstract
In this paper we report on the characteristics of Schottky contact behavior of AlGaN/GaN High Electron Mobility Transistors (HEMTs) on a Si Substrate. A variety of electrical techniques such as capacitance-voltage (C-V) and deep level transient spectroscopy (DLTS) measurements have been used to characterize the diode. The behavior of the ideality factor n, the effective barrier height Φb, and the series resistance RS is studied with temperature. C-V measurements successively sweeping up and down the voltage from 0 V to 12 V(absolute value) have demonstrated a hysteresis phenomenon which is more pronounced when the temperature increases. This parasitic effect can be attributed to the presence of traps activated in the Schottky diode. The related deep levels defects which are responsible for parasitic effects, were characterized and extracted by the Deep Level Transient Spectroscopy (DLTS) technique that has been used in previous studies. The identification of these traps showed a correlation between DLTS and C-V measurements.
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