Analysis of the Uniformization of the QCM Mass Sensitivity Distribution through a Dot Multiring Electrode Structure.

Abstract

In this paper, to improve the uniformity of the quartz crystal microbalance (QCM) mass sensitivity distribution, the effect of the size of dot ring electrode and dot double-ring electrode on the mass sensitivity distribution is analyzed theoretically from the perspective of the electrode width ratio, the width of the partially electroded region, and the electrode thickness. Within a certain range of electrode thickness, there is an optimum electrode width ratio to obtain a relatively uniform distribution. As long as the width of the partially electroded region is not too large or too small, it has no significant influence on the uniformity of the mass sensitivity of the optimum electrode size. The dot triple-ring electrode is proposed and the comparison of the uniformity between the three electrode structures indicates that more division of the electrode region can greatly improve the uniformity of the mass sensitivity distribution. This research provides a new direction for the uniformization of QCM mass sensitivity distribution.