Abstract
The transit time effect (TTE) on stroboscopic waveform measurements in the scanning electron microscope is analysed. Here the TTE means the voltage contrast variation due to the time-varying surface electric field near the measurement electrode. The results show that the TTE on waveform rise and fall times or amplitude measurements cannot be disregarded for waveforms with a time variation of the order of 100 ps or less. The TTE on pulse width measurements does not appear to be so large.
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