Abstract
An important aspect that must be considered when designing micro-electro-mechanical systems (MEMS) for all domains, including robotics, is the thermoelastic damping which occurs when the MEMS material is subjected to cyclic stress. This paper is focused on a model for the thermoelastic damping developed based on the generalized thermoelastic theory with the non-Fourier thermal conduction equation. The model was implemented in MATLAB and several simulations were performed. The theoretical results show a decrease in the deflection amplitude with the increase in time. The deflection amplitude decrease was validated by the experimental investigations, consisting of measuring the loss in amplitude and velocity of oscillations as a function of time. Moreover, this paper also presents the influence of the geometric dimensions on the mentioned decrease, as well as on the initial and final values of the amplitude for several polysilicon resonators investigated in this paper.
Highlights
Robotics is one of the fields that has been greatly impacted by the miniaturization trend of the last few decades
Roboticsisisone oneof ofthe theengineering engineeringfields fieldsthat thathas hasbeen beenimpacted impactedby bythe thedevelopment developmentof ofMEMS
In order to have high reliabilityrobots, it is requiredthat that the resonators used in the robot design do not fail during the operation
Summary
Robotics is one of the fields that has been greatly impacted by the miniaturization trend of the last few decades. MEMS, as well as nano-electro-mechanical systems (NEMS), are an essential discovery for how materials, devices, and systems are perceived, designed, and manufactured in general [2] Today, they are found in devices and even robots used in many real-world applications from domains such as terrestrial transportation, wearable devices, medicine, metrology, inspection and maintenance, micro-optics, and so on [1,2,3]. The model was validated by experimental measurements, and it was used to determine the influence of the micro-beam’s geometric dimensions on the decrease in deflection amplitude and on the initial and final amplitude value This presents interest, for example, for applications where the detection technique is based on laser beam resonators
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