Abstract
We prepared SAW resonators using a SiO <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf> /Cu/ 0°YX-LiNbO <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf> structure. In this configuration, apodized interdigital transducers (IDTs) are commonly adopted for suppressing series of spurious responses caused by the transverse modes. However, the apodization is shown to deteriorates the normalized Q factor at the anti-resonance frequency and its influence grows when the normalized aperture width is narrow. From the optical measurement of these devices, the Q degradation is found to be mainly due to the radiation of SH waves from the resonator. The radiation consists of the bulk, diffraction, and back-scattering waves and depends on the steepness of the apodizaiton.
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