Abstract
The method for calculating the kinetics of crystal growth and epitaxy based on the two-dimensional model of the mass crystallization in many atomic layers has been developed. The kinetics of crystal growth is analyzed with due regard for the initial (critical) size of two-dimensional nuclei, the dependence of the growth rate of two-dimensional nuclei on their size, and the non-steady-state frequency of the formation of two-dimensional nuclei. The effect of characteristic parameters of crystallization on the kinetics of formation of epitaxial films and structure is also studied.
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