Abstract

In surface-wave plasmas, the energy can be transferred to the plasma electrons through both ohmic (collisional) and collisionless heating mechanisms. At very low pressure, when the electron–neutral collision frequency is much lower than the wave frequency (collisionless regime), a resonance is excited close to the tube walls where the electron plasma frequency in the radially-inhomogeneous plasma column reaches the wave frequency. In such conditions, the sharp rise of the component of the surface-wave electric field perpendicular to the tube axis can induce transit-time heating. At the resonant point, the long-wavelength electromagnetic surface wave can also be converted into short-wavelength electrostatic Langmuir waves that propagate down the density gradient. In this work, spatially-resolved trace-rare-gases optical emission spectroscopy combined with collisional-radiative modeling is used to analyze the electron energy distribution function (EEDF) and wave–particle interactions in low-pressure argon plasma columns sustained by an electromagnetic surface wave at 600 MHz (over-dense plasma). The EEDF is found to depart from a Maxwellian with the presence of a high-energy tail. The relative population of high-energy electrons increases with the axial distance towards the end of the plasma column where the electron density decreases and the resonance point becomes closer to the discharge axis. Over the range of experimental conditions examined, the high-energy tail increases with the characteristic length of the plasma density gradient at the resonance point; a feature that can be linked to collisionless electron heating by Landau damping of Langmuir waves.

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