Abstract

A piezoelectric bimorph beam, as an upgraded cantilever beam structure, can be used to detect gas content and build a micro-actuator, among other functions. Thus, this beam is widely applied to microelectromechanical systems (MEMS), transformers, and precision machinery. For example, when photoacoustic spectroscopy is performed to detect oil-soluble gas in transformers, a micro-cantilever beam can be used to detect gas content. The dynamic characteristics of piezoelectric bimorph beams, such as resonant frequency, are important indexes in the applications of these beams. The equivalent circuit model for a piezoelectric bimorph beam is examined in this study and an admittance test is performed on the beam to accurately, quickly, and economically measure and analyze its dynamic characteristics. Then, the least squares method is applied to obtain the characteristic curves of the admittance circle, amplitude frequency, and phase frequency; identify the dynamic characteristics of the piezoelectric bimorph beam (e.g., resonant frequency); and determine the parameters of the equivalent circuit. The resonant frequency of the piezoelectric bimorph beam is 207.67 Hz based on the result of the admittance circle test, which is basically consistent with the results of microscope image method (i.e., 207.85 Hz) and the theoretical calculation (i.e., 222.03 Hz). This finding proves the validity of the proposed test method. This method cannot only improve the detection speed of piezoelectric bimorph beams, but can also provide a fast detection strategy for testing the characteristics of such beams during photoacoustic spectroscopy.

Highlights

  • A micro-piezoelectric bimorph beam is made of piezoelectric, elastic, and metallic materials, with the metallic materials acting as a common electrode [1,2,3]

  • This study presents the application of an admittance test to determine the dynamic characteristics of a piezoelectric bimorph beam

  • A dynamic signal analyzer is used to perform the characteristics of a piezoelectric bimorph beam

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Summary

Introduction

A micro-piezoelectric bimorph beam is made of piezoelectric, elastic, and metallic materials, with the metallic materials acting as a common electrode [1,2,3]. An admittance test method is micro-vision, and stroboscopic micro-interference can achieve dynamic characteristics for a high-precision, proposed in this study to realize low-cost, accurate, and fast measurement and analysis of the non-contact measurement of microstructures [12,13]. These test methods exhibit low efficiency dynamic characteristics of piezoelectric bimorph beams. The mechanical vibration characteristics to realize low-cost, accurate, and fast measurement and analysis of the dynamic characteristics of of a piezoelectric bimorph beam can be determined by measuring and analyzing its electrical piezoelectric bimorph beams This method is based on the electromechanical coupling characteristics admittance characteristics [14,15]. Analysis of the Equivalent Circuit and Principle of a Piezoelectric Bimorph Beam

Analysis of the Equivalent
12 Rd 1R0 2
Methods for the Admittance of aanalyzer
Experiment Result and Discussion of the Admittance Test
Results
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