Abstract

In the modern world, the most important task for the development of the nano industry is the formation of the infrastructure of the nano industry corresponding to its modern level in economically developed countries. One of the indicators of such infrastructure is the level of its metrological support. This article analyzes the use of a modern instrumental base of high-precision measuring devices in nanotechnology, including the use of metrologically ensured in operation measuring instruments. The modern fundamentals of the technical support of nanometrology are outlined, and special attention is paid to the main metrological operations - verification and calibration. The issues of instability, accuracy, and uncertainty of nano measurements are described. Analysis and monitoring of measurement needs and measurement capabilities for the purpose of metrological support of nanoproducts are very relevant at the present time. Keywords: nanometrology, accuracy, metrological assurance, traceability, measuring instruments.

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