Abstract
Electrical properties and the number of unpaired electrons localized in oxygen vacancies of SnO2 thin films were quantitatively analyzed using the van der Pauw method and ESR spectra, respectively, in order to clarify the source of carrier electrons induced on gas sensing. The concentration of carriers generated was related to the amount of unpaired electrons localized in oxygen vacancies which were produced under the flammable gas atmosphere. No adsorbed oxygen was detected by ESR. From these results it is concluded that most of the carrier electrons were supplied not from adsorbed oxygen on SnO2 surface but from oxygen vacancies of the SnO2 surface layer.
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