Abstract
The characterization of surface structural defects by low energy electron diffraction is discussed. The identification of crystal mosaic structure, random strain, antiphase domains and steps is emphasized, and it is shown that they produce characteristic effects in the angular distribution of intensity in diffracted beams. Analytical models are summarized. They are also applicable to other surfacesensitive diffraction techniques such as reflection high energy electron diffraction and grazing angle X-ray diffraction. The quantitative analysis of these several types of defects is illustrated by measurements on the surface of an epitaxially grown Ag(111) film and on a sputter-etched and annealed GaAs(110) surface.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
