Abstract
In this paper the effect of different geometry on the squeeze film damping of fixed-fixed beam RF MEMS switch is analyzed. Squeeze film air damping analysis is done on the fixed-fixed beam membrane for different geometry of membrane. The surface pressure distribution and damping force on the membrane is simulated for different geometry of membrane. Membrane with slits of length 60μm was found to be the better choice when compared to other geometry of membrane. The variation in damping force with respect to radius of hole and length of slits is analyzed for different ambient pressures. Variation in damping force with respect to radius of hole and length of slits was obtained as minimum for lower values of ambient pressure. Modeling and simulation of damping force and surface pressure is done in COMSOL Multiphysics.
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