Abstract
The spectra and kinetics of the rising and decay of cathodoluminescence (CL) of thin Y 2 O 3 :Eu films obtained by the method of RF-magnetron sputtering are studied. Based on the shape of the CL spectra at different energies and excitation current densities, the possibility of the formation of irregular solutions of yttrium and europium oxide and the features of the structure of surface and bulk layers are shown. The dependence of the CL intensity on the energy of the exciting electrons and the current density of the electron irradiation has been investigated. The CL decay time constant for the 612 nm luminescence is determined, the value of which is in the range (1.8 – 4.1) ms. It is shown that this quantity is a complex function of the type of film deposition atmosphere, the concentration of the activator, and the duration of the exciting pulses. The features of CL rising are investigated and it is proposed to analyze the structural perfection of Y 2 O 3 :Eu thin films based on the delay in CL rising. Key words : yttrium oxide, cathodoluminescence, thin films.
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