Abstract

We study how the dielectric constant of passivation layer εr and field-plate related parameters (its length LFP, passivation-layer thickness Ti) affect the reduction rates of drain current arising from drain lag, gate lag and current collapse in AlGaN/GaN HEMTs. We plot the current-reduction rates versus Ti for different εr. It is indicated that depending on εr, the drain-lag and current-collapse rates take minimum at certain Ti. When εr is 7, 20, 30 and 50, the current-reduction rates become minimum at Ti = 0.03, 0.1, 0.1, and 0.2 μm, respectively. Hence, at the minimum point, εr/Ti which is proportional to capacitance of the passivation layer takes a nearly constant value at 250 ± 50/μm. At this value of Ti, the lags and current collapse are reduced when LFP becomes long for every εr considered here.

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