Analysis of Secondary Electron Yield and Energy Spectrum of Metal Materials based on Furman Model

Abstract

In the study of secondary electron emission, this paper first uses the Furman model to classify secondary electrons into three types of electrons and model them separately. Second, the Monte Carlo simulation process of the model is realized. In the process of establishing Monte Carlo simulation, a single particle model is used, and the energy spectrum distribution of the entire model is presented based on the superposition of a large number of single-particle distributions. Thirdly, several sets of experiments on the corresponding energy spectrum distribution data obtained under different incident energies of one electron and different incident angles were carried out. Then, discuss the relationship between the secondary electron yield and the incident angle and energy of the primary electron, and quantitatively analyze the relationship between the secondary electron yield and the incident electron angle and incident energy. Finally, the relationship between the incident electron energy and incident angle and the secondary electron emission yield was compared and verified.