Abstract

This paper presents an analysis of response variation in the fast and precise micrometer stroke positioning of table drive systems with rolling friction. The rolling friction in the mechanism behaves as a nonlinear and dynamic elastic component with a hysteresis property in a micro displacement region, which may cause the response variation in a sequential micrometer stroke positioning motion. In this study, a mechanism of the variation is analytically examined by using a rolling friction model. And then, a rolling friction model-based simple feedforward friction compensation is adopted to improve the positioning performance. The rolling friction model-based analysis and friction compensation are verified by numerical simulations and experiments using a prototype of linear motor-driven table systems.

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