Analysis of Residual Stress around Semi-Circular Surface Notches due to Excessive Pressure

Abstract

Residual stresses due to excessive internal pressure applied to an array of semi-circular surface notches is analyzed by body force method. The treated problem corresponds to a simple model of the Stealth Dicing (SD) which is expected as an alternative splitting technology applicable to brittle materials. In SD, laser beam of specific wave length is focused and scanned inside of the material to produce a SD-process zone which includes an array of microvoids. Each microvoid is thought to be received an excessive internal pressure due to thermal expansion and then material is split along a plane which contains an array of microvoids. After the mechanical splitting process, there expected to present a considerable residual stresses in the vicinity of an array of microvoids exposed at the splitting surface. In the present study, by analyzing the elastic-plastic stress fields near the array of surface microvoids, the mechanical characteristics of the SD induces surface is discussed.