Abstract

Two planar optical waveguides in Cr:KTiOPO 4 and Er:KTiOPO 4 were formed by implantation of MeV He ions. The dose of implanted He ions was 1.4×10 16 ions cm −2 by an energy of 2.8 MeV at 300 K. The dark modes were measured by using the standard dark modes measurement technique involving an isosceles prism (LiTaO 3). The refractive index profiles of the waveguide were analyzed by using parametrized index profile reconstruction (PIPR) methods. The lattice damage in the guiding region of the crystal that was caused by the implantation of MeV He ions was investigated by using RBS/channeling technique. The existence of Er 3+ ions in Er:KTiOPO 4 was verified using total-reflection X-ray fluorescence (TXRF) analysis techniques and the fluorescence spectra of Cr 3+ in Cr:KTiOPO 4 were measured.

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