Abstract
In this article the basic characteristics of a piezoelectric actuator are theoretically analyzed, and the relationship between the thrust force and the weight force are clarified, and verified by the experiments. Various prototypes of plane ultrasonic piezoelectric actuators were experimentally constructed, and the fundamental characteristics mere measured. The vibration mode of the actuators was also analyzed by ANSYS, and compared with the experimental results.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
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