Abstract
Peeled surfaces in polyimide film/adhesive/copper foil system were analyzed by ESCA. The peaks due to oxygen, nitrogen and carbon were noticed, and the values of O/N and N/C in peeled surfaces were determined. The values in both polyimide film and copper foil sides were very similar to those on the surface of polyimide film before adhesion. The values are also very similar to those calculated from the chemical structure. On the other hand, the value of O/N in adhesive itself is very different from that on peeled surfaces. It is concluded that fracture occurs within polyimide film, i.e., cohesive fracture.
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