Abstract
This is paper briefly explains the MEMS based piezoelectrically actuated micropump and its applications for the drug delivery system. The micropump is designed and it consists of four elements like electrodes, piezoelectric layer, flexible membrane and a reservoir. It is analyzed for three different materials like PZT-5H, PZT-5A and BaTiO3. Among them BaTiO3 is used as piezoelectric material. By using the FEM tool COMSOL Multiphysics, mechanical behavior of the micropump is evaluated as flow velocity and flow rate of 8.92 m/s and 0.854 ml/min at 50 V respectively. The obtained flow rate for the micropump is best suitable in cardio-vascular, hypertension cases where the drug need to be delivered with an appropriate flow rate.
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