Abstract
This work presents the parasitic feed-through capacitance in a MEMS capacitive gyroscope with push-pull configuration. The push-pull configuration was adopted for driving the gyroscope resonator differentially to nullify the linear acceleration effect. The drive mode oscillator of the gyroscope was analyzed theoretically and experiments were carried out to quantize the parasitic feed-through level. It was found that the push-pull configuration worsen the signal to noise ratio by adding up the feed-through noise level at the difference amplifier. We proposed a novel feed-through cancellation scheme after the charge amplifier stage. The experimental results show that, signal to noise ratio (SNR) of 2 dB was achieved without feed-through cancellation. Furthermore, by exploiting the proposed technique, the signal to noise ratio was improved to 28 dB.
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