Abstract
The dual-mass Silicon micro-machined gyroscope was processed by micro-fabrication technology. It could lead to quadrature coupling error and influence the output of the silicon micro-gyroscope. We select two commonly used gyroscope structures and analyze their quadrature coupling coefficient. Firstly, the complete dynamic model is proposed for the DMSG and the theoretical models of sensitivity and orthogonal signals are given by the dynamic model. Second, the influence of support structure on sensitivity and orthogonal signals are analyzed. The sensitivity and orthogonal signal of the two types of DMSG are derived and compared. The results show that the theoretical accuracy of the sensitivity and orthogonal signals can be improved about 50% and 30% after considering the support structure. The type-B gyroscope are insensitive to the Coriolis force (≈13% reduction) when compared to Type-A gyroscope. On the other hand the type-B gyroscope are insensitive to coupling stiffness (≈85% reduction) when compared to Type-A gyroscope. At last, the reliability of the theory is verified by simulations and experiments.
Highlights
The Dual-mass Silicon Micro-machined Gyroscopes (DSMG) have a lot of merits, such as low power consumption, small volume and weight, high shock resistivity, and suitable for the harsh conditions
The complete dynamic model is proposed for the DMSG, and the theoretical models of sensitivity and orthogonal signals are given by the dynamic model
The detection comb of Type-A gyroscope is arranged on the proof mass, while the detection comb of Type-B gyroscope is arranged on the support structure
Summary
The Dual-mass Silicon Micro-machined Gyroscopes (DSMG) have a lot of merits, such as low power consumption, small volume and weight, high shock resistivity, and suitable for the harsh conditions. They have a wide application prospect in civilian and military fields. The drive and sense modes of a Dual-mass Silicon Micro-machined Gyroscopes are designed to be perfectly orthogonal to each other. The researches focus on the orthogonal signal of single-mass silicon micro-gyroscope. The influence of support structure on sensitivity and orthogonal signals are analyzed. The sensitivity and orthogonal signal of the two types of DMSG are derived and compared. The reliability of the theory is verified by finite element method (FEM) dynamic simulation and experiments
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