Analysis of optical thickness determination of materials by THz-TDS

Abstract

Terahertz time-domain spectrometry (THz TDS) is a sensitive probe of the complex dielectric response of materials. Methods vary for converting time-domain response into final material optical parameters together with estimation of associated uncertainties. Here we point out the importance of using an accurate extraction procedure with particular emphasis on the error introduced by associated inaccuracy in thickness determination of a sample. The Total Variation (TV) method is used to estimate sample thickness to sub-micron accuracy, by constructively using the phenomena of multiple internal reflections ('ringing') within a sample. The applicability and performance of the TV methodology is discussed.