Abstract
In this paper, the nonlinear oscillator arising in the microbeam-based micro-electromechanical system (MEMS) is described. The motion equation of a microbeam is simplified into an ordinary differential equation by using the Galerkin method. The nonlinear ordinary differential equation is solved by using two methods including the Parameter-Expansion and Equivalent Linearization Methods. To verify the accuracy of the present methods, illustrative examples are provided and compared with other analytical, exact and numerical solutions.
Highlights
Micro-electromechanical systems (MEMS) is a process technology used to create tiny integrated devices or systems that combine mechanical and electrical components
The nonlinear oscillator arising in the microbeam-based micro-electromechanical system (MEMS) is described
It is difficult to get analytic approximations for different phenomena in MEMS, there are some analytic techniques for nonlinear problems of MEMS such as perturbation techniques [4], the energy balance method (EBM) [5], the homotopy analysis method (HAM) [6] and the He’s Variational Approach (VA) [7]
Summary
Micro-electromechanical systems (MEMS) is a process technology used to create tiny integrated devices or systems that combine mechanical and electrical components They are fabricated using integrated circuit (IC) batch processing techniques and can range in size from a few micrometers to millimetres. The Parameter-Expansion Method proposed by He [8, 10] is an effective approach to analytical investigation of nonlinear problems. This approach are investigated in different works [9, 11,12,13,14,15,16,17]. The analytical results achived by two methods are compared with the previous analytical results, the exact results and the numerical results
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