Abstract
The internal electric field coupling noise of a quartz flexible accelerometer (QFA) restricts the improvement of the measurement accuracy of the accelerometer. In this paper, the internal electric field coupling mechanism of a QFA is studied, an electric field coupling detection noise model of the accelerometer is established, the distributed capacitance among the components of the QFA is simulated, the structure of the detection noise transfer system of different carrier modulation differential capacitance detection circuits is analyzed, and the influence of each transfer chain on the detection noise is discussed. The simulation results of electric field coupling detection noise show that the average value of detection noise can reach 41.7 μg, which is close to the effective resolution of the QFA, 50 μg. This confirms that electric field coupling detection noise is a non-negligible factor affecting the measurement accuracy of the accelerometer. A method of adding a high-pass filter to the front of the phase-shifting circuit is presented to suppress the noise of electric field coupling detection. This method attenuates the average value of the detected noise by about 78 dB, and reduces the average value of the detected noise to less than 0.1 μg, which provides a new approach and direction for effectively breaking through the performance of the QFA.
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