Abstract
Nano-channel array has been fabricated by anodic aluminum oxide(AAO) method with 100 V, 120 V, and 140 V bias voltages and 1, 5-step AAO process in this study. We discussed the growing mechanism of nano-channels and effect of multi-step in AAO process. At least, the distribution and circularity of nano-channel array under different bias voltage were analyzed.
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