Abstract
The development trends in modern science and technology are miniaturization, integration, and intelligence. Microsensors have developed rapidly with the development of micro-electromechanical systems (MEMS) and micromachining technology. In this paper, the concepts and types of MEMS sensors are summarized by literature and case analyses, and their research statuses and application fields are briefly introduced. The development trends of MEMS sensors are discussed. This paper finds that combining sensors with intelligent products can achieve another application climax of MEMS sensors.
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