Analysis of material composition with energy dispersive of X-ray spectroscopy method

Abstract

ZnO is a semiconductor material with an energy band gap of 3.37 eV at room temperature, this causes ZnO to work in the UV light range. In this study, ZnO material doped with Nitrogen with a doping percentage was 10%. Deposition of ZnO: N material was carried out on a glass substrate using a spray coating technique. A composition test was performed using SEM-EDX. SEM-EDX is a device that has a wide magnification range to observe a sample from an overall view, with images of nanostructures at very high magnification. SEM-EDX serves to analyze topography, morphology, composition, and scale information from SEM image images on a material. Composition testing using SEM-EDX tools can result in pure impurity, pure oxide, and pure. For the results of pure impurity test results were obtained in the form of elements of elements C, N, O, and Zn with a mass of 14.46%, 0.53%, 54.70%, and 30.30%. For the oxide test on ZnO doping N 10%, the results were obtained in the form of elements of N, O, and Zn elements, each with a mass of 2.45%, 19.17%, and 78.38%. For pure test on ZnO doping N 10%, the results are in the form of elements of N, O, and Zn elements, each with a mass of 0.90%, 57.80%, and 41.31%.